X-ray optics made by X-ray lithography: Process optimization and quality control
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(Sprache: Englisch)
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial...
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Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Klappentext zu „X-ray optics made by X-ray lithography: Process optimization and quality control “
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Bibliographische Angaben
- Autor: Frieder Johannes Koch
- 2017, 170 Seiten, mit Abbildungen, Masse: 14,8 x 21 cm, Kartoniert (TB), Englisch
- Verlag: KIT Scientific Publishing
- ISBN-10: 3731506793
- ISBN-13: 9783731506799
Sprache:
Englisch
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